FIB Focused Ion Beam

  • High-resolution SEM and STEM
  • Spatially resolved element analysis
  • Korrelative Mikroskopie
  • Analysis of air- or moisture-sensitive samples
  • Preparation of (S)TEM lamellas
  • Preparation of FIB cross-sections
  • FIB-REM tomography
  • Energy dispersive X-ray spectrometry (EDX)
  • Wavelength dispersive X-ray spectrometry (WDX)
  • Electron backscatter diffraction (EBSD)
  • ESB (Energy Selective Backscattered)
Corrosion investigation on the FIB cross-section

The scanning electron microscopes (SEM) equipped with a field emission cathode enable material analyses in the nanometre range. Images with the secondary electron (SE) detectors are topography or edge-emphasised, while images with the backscattered electron (RE) detector show the material or channeling contrast. Detectors for energy or wavelength dispersive X-ray spectrometry (EDX, WDX) are available for spatially resolved element analysis. The crystallographic properties can be analysed using electron backscatter diffraction (EBSD). EBSD provides information on phases, grain sizes and crystal orientations. The focussed ion beam (FIB) enables targeted material removal. With FIB, cross-sections in surfaces can be prepared with high spatial resolution and analysed in situ by electron microscopy. This method is therefore suitable for analysing layer systems, defects or corrosion, for example.

  • Visualisation of material contrasts with RE detector
  • RE images of microstructures after ion beam preparation
  • Images of nanoparticles with InLens detector
  • ESB (Energy Selective Backscattered)
  • Energy dispersive X-ray spectrometry (EDX)
  • Wavelength dispersive X-ray spectrometry (WDX)

Contact Person

Rita Bretzler
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